conductor cleaning equipment, corrosion platform, automatic corrosion rinse platform, wafer rinse platform etc.
技术规格：非标定制。
Technical Specification: Non-standard specifications, it is customized.
配套选项：QDR(quick dump rinse)清洗槽、PH和电导率的在线检测与控制，各种工艺模块和伺服机械传送系统等
Option: QDR tanks, online detecting and controlling of PH and conductivity，difference process modules, wafer servo motor transportation etc.